This text is a comprehensive volume on analytical techniques used in materials science for the characterization of surfaces, interfaces and thin films. This volume describes the techniques used in modern materials analysis with the emphasis on analysis at surfaces and interfaces, in thin films, and wherever analysis of very small volumes or areas of solid material (microanalysis) is involved. The chapters are written to a specific format involving a description of how the technique works, what information it gives, what it is practically used for today and what the future trends may be.